Vibration Insensitive Interferometric Optical Testing
نویسنده
چکیده
The measurement accuracy of an interferometric optical test is generally limited by the environment. This paper discusses two single-shot interferometric techniques for reducing the sensitivity of an optical test to vibration; simultaneous phase-shifting interferometry and spatial carrier interferometry. ©2004 Optical Society of America OCIS codes: (120.0120) Instrumentation, measurement and metrology; (120.3180) Interferometry; (120.3940) Metrology; (120.5050) Phase measurement
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